Optical displacement meter
Abstract:
There is provided an optical displacement meter capable of accurately measuring a profile of a measurement object even when multiple reflections are caused. At the time of setting, reference data indicating a reference profile of a measurement object is registered by a registration unit, and a mask region is set to the reference data by a setting unit. At the time of measurement, reflected light from the measurement object is received by a light receiving unit, and a peak in an output light receiving amount distribution is detected by a peak detection unit. Temporary profile data of the measurement object is generated by a profile generation unit based on a position of the detected peak. A position of the mask region for the temporary profile is corrected by a correction unit.
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