Method for accelerated high-resolution scanning microscopy
Abstract:
In a method for high-resolution scanning microscopy of a sample, provision is made of focusing of illumination radiation into an illumination spot in or on the sample and stimulating the emission of detection radiation at a sample spot that coincides with the illumination spot. The sample spot is imaged into an image that is static on a spatially resolving surface detector having pixels of a size that spatially resolve the image, wherein the imaging has a an optical imaging resolution limit. The entire sample is captured by performing a scanning movement of the illumination spot and of the coinciding sample spot over the sample in a scanning operation. An image of the sample having a resolution that is increased beyond the optical imaging resolution limit of the imaging is produced from the data of the pixels for each scanning position.
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