Invention Grant
- Patent Title: Wavelength variable interference filter and optical module
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Application No.: US15896460Application Date: 2018-02-14
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Publication No.: US10746909B2Publication Date: 2020-08-18
- Inventor: Akira Sano
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@427a39a6
- Main IPC: G02B5/26
- IPC: G02B5/26 ; G02B5/28 ; G02B26/00 ; G01J3/26

Abstract:
A wavelength variable interference filter includes: a first substrate on which a first reflection film is formed; and a second substrate that includes a movable portion on which a second reflection film facing the first reflection film is formed and a holding portion surrounding an outer circumference of the movable portion and holding the movable portion so that the movable portion is displaceable in a thickness direction of the second reflection film. The movable portion has long and short sides in a plan view. The holding portion includes a long-side holding portion formed along the long side and a short-side holding portion formed along the short side. The rigidity of the short-side holding portion is lower than the rigidity of the long-side holding portion.
Public/Granted literature
- US20180246264A1 WAVELENGTH VARIABLE INTERFERENCE FILTER AND OPTICAL MODULE Public/Granted day:2018-08-30
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