Invention Grant
- Patent Title: Silicon nitride grating couplers
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Application No.: US15878025Application Date: 2018-01-23
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Publication No.: US10746925B2Publication Date: 2020-08-18
- Inventor: Ajey P. Jacob , Yusheng Bian
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: G02B5/18
- IPC: G02B5/18 ; G02B6/124 ; G02B6/136 ; G02B6/132 ; G02B6/30 ; G02B6/12

Abstract:
Grating couplers and methods of fabricating a grating coupler. The grating coupler may include a plurality of grating structures arranged on a substrate and a layer arranged over the grating structures. The grating structures are composed of a first material characterized by a first refractive index with a real part. The layer is composed of a second material characterized by a second refractive index with a real part. The real part of the second refractive index is greater than the real part of the first refractive index of the first material for electromagnetic radiation with a wavelength in a range of 1 micron to 9 microns.
Public/Granted literature
- US20190227229A1 SILICON NITRIDE GRATING COUPLERS Public/Granted day:2019-07-25
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