Invention Grant
- Patent Title: Multi-layer microactuators for hard disk drive suspensions
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Application No.: US16254240Application Date: 2019-01-22
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Publication No.: US10748564B2Publication Date: 2020-08-18
- Inventor: Kuen Chee Ee , Long Zhang , Peter Hahn , David Glaess , Amornrat Jaturawit
- Applicant: Magnecomp Corporation
- Applicant Address: US CA Murrieta
- Assignee: Magnecomp Corporation
- Current Assignee: Magnecomp Corporation
- Current Assignee Address: US CA Murrieta
- Agency: DLA Piper LLP (US)
- Main IPC: G11B5/48
- IPC: G11B5/48 ; H01L41/047 ; H01L41/09

Abstract:
A multi-layer microactuator for a hard disk drive suspension includes a piezoelectric (“PZT”) layer, a constraining layer, a lower electrode layer, a middle electrode layer, and an upper electrode layer. The lower electrode layer is on a bottom surface of the PZT layer and includes a first lower electrode island, a second lower electrode island, and a third lower electrode island. The second lower electrode island includes a finger extending from a main body portion towards a first end of the PZT layer. The middle electrode layer is disposed between a top surface of the PZT layer and a bottom surface of the constraining layer. The middle electrode layer including a first middle electrode island and a second middle electrode island, the second middle electrode island including a finger extending from a main body portion towards the first end of the PZT layer.
Public/Granted literature
- US20190228796A1 Multi-Layer Microactuators For Hard Disk Drive Suspensions Public/Granted day:2019-07-25
Information query
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