Invention Grant
- Patent Title: Probe methodology for ultrafine pitch interconnects
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Application No.: US16701606Application Date: 2019-12-03
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Publication No.: US10748824B2Publication Date: 2020-08-18
- Inventor: Javier A. Delacruz , Paul M. Enquist , Gaius Gillman Fountain, Jr. , Ilyas Mohammed
- Applicant: Invensas Bonding Technologies, Inc.
- Applicant Address: US CA San Jose
- Assignee: Invensas Bonding Technologies, Inc.
- Current Assignee: Invensas Bonding Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L23/00

Abstract:
Representative implementations of devices and techniques provide a temporary access point (e.g., for testing, programming, etc.) for a targeted interconnect located among multiple finely spaced interconnects on a surface of a microelectronic component. One or more sacrificial layers are disposed on the surface of the microelectronic component, overlaying the multiple interconnects. An insulating layer is disposed between a conductive layer and the surface, and includes a conductive via through the insulating layer that electrically couples the conductive layer to the target interconnect. The sacrificial layers are configured to be removed after the target interconnect has been accessed, without damaging the surface of the microelectronic component.
Public/Granted literature
- US20200105630A1 PROBE METHODOLOGY FOR ULTRAFINE PITCH INTERCONNECTS Public/Granted day:2020-04-02
Information query
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