Invention Grant
- Patent Title: Multi-level ferroelectric memory device and method of manufacturing the same
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Application No.: US15917346Application Date: 2018-03-09
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Publication No.: US10748930B2Publication Date: 2020-08-18
- Inventor: Se Hun Kang , Deok Sin Kil
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6fe3db6
- Main IPC: H01L27/11585
- IPC: H01L27/11585 ; H01L29/51 ; H01L29/66 ; H01L21/28 ; H01L27/1159 ; H01L29/78

Abstract:
A ferroelectric memory device may include a semiconductor substrate, a plurality of ferroelectric layers, a source, a drain and a gate. The semiconductor substrate may have a recess. The ferroelectric layers may be formed in the recess. The source may be arranged at a first side of the recess. The drain may be arranged at a second side of the recess opposite to the first side. The gate may be arranged on the ferroelectric layers. The ferroelectric layers may be polarized by different electric fields.
Public/Granted literature
- US20180197879A1 MULTI-LEVEL FERROELECTRIC MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2018-07-12
Information query
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