Invention Grant
- Patent Title: Semiconductor device formed by oxide semiconductor and method for manufacturing same
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Application No.: US16212599Application Date: 2018-12-06
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Publication No.: US10748939B2Publication Date: 2020-08-18
- Inventor: Hideki Kitagawa , Tohru Daitoh , Hajime Imai , Hisao Ochi , Tetsuo Fujita , Tetsuo Kikuchi , Shingo Kawashima , Masahiko Suzuki
- Applicant: SHARP KABUSHIKI KAISHA
- Applicant Address: JP Sakai, Osaka
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Sakai, Osaka
- Agency: ScienBiziP, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@594c1083
- Main IPC: H01L27/12
- IPC: H01L27/12 ; G02F1/1343 ; H01L21/28 ; H01L21/283 ; H01L21/306 ; H01L23/532 ; H01L21/768 ; H01L29/417 ; H01L29/786 ; H01L23/544 ; H01L29/66 ; G02F1/1368

Abstract:
A semiconductor device (100A) is provided with: a gate electrode (3); an oxide semiconductor layer (5); a thin-film transistor (101) including a gate insulating layer (4), a source electrode (7S), and a drain electrode (7D); an inter-layer insulating layer (11) arranged so as to cover the thin-film transistor (101) and come into contact with a channel area (5c) of the thin-film transistor (101); and a transparent electroconductive layer (19) arranged on the inter-layer insulating layer (11), the source electrode (7S) and the drain electrode (7D) each having a copper layer (7a), and the device being further provided with a copper oxide film (8) arranged between the source and drain electrodes and the inter-layer insulating layer (11). The inter-layer insulating layer (11) covers the drain electrode (7D) with the copper oxide film (8) interposed therebetween. The transparent electroconductive layer (19) is directly connected to the copper layer (7a) of the drain electrode (7D) inside a contact hole (CH1) formed in the inter-layer insulating layer (11), without the copper oxide film (8) being interposed therebetween.
Public/Granted literature
- US20190109159A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2019-04-11
Information query
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