Invention Grant
- Patent Title: Image sensor having an etch stop layer on the insulation layer
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Application No.: US16285510Application Date: 2019-02-26
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Publication No.: US10748968B2Publication Date: 2020-08-18
- Inventor: Dong Chan Kim , Kwan Sik Kim , Bo Yun Kim , Eun Sung Seo , Il Young Yoon , Seung Hoon Choi
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey and Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2e101de8
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L27/30 ; H01L51/44 ; H01L31/0232 ; H01L31/0224

Abstract:
An image sensor includes a sensor region for receiving light and generating an image data and a pad region adjacent to the sensor region, an insulation layer on the substrate, and a lower transparent electrode on the insulation layer in the sensor region, and an etch stop layer on the insulation layer in the sensor region and pad region. The etch stop layer may include silicon nitride. A height of an uppermost surface of the lower transparent electrode may be substantially equal to a height of an upper surface of the etch stop layer, with respect to the substrate.
Public/Granted literature
- US20190371861A1 IMAGE SENSOR Public/Granted day:2019-12-05
Information query
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