A semiconductor device includes a source region configured to provide at least a portion of a MOSFET source of a MOSFET and at least a portion of a JFET source of a JFET. The semiconductor device includes a JFET channel region in series with the source region and a MOSFET channel region of the MOSFET, and disposed between a first JFET gate and a second JFET gate. The semiconductor device includes a JFET drain disposed at least partially between a gate insulator of a gate of the MOSFET and at least a portion of the JFET channel region, and in electrical contact with the first JFET gate and the second JFET gate. Various example implementations of this type of semiconductor device provide a SiC power MOSFET with improved short-circuit capability and durability, with minimal impact on RDS-ON.