Invention Grant
- Patent Title: Method for making ferroelectric material thin films
-
Application No.: US15430135Application Date: 2017-02-10
-
Publication No.: US10749056B2Publication Date: 2020-08-18
- Inventor: Jonathan E. Spanier , Peter K. Davies , Andrew M. Rappe , Liyan Wu , Andrei R. Akbasheu , Ilya Grinberg
- Applicant: Drexel University , The Trustees of the University of Pennsylvania
- Applicant Address: US PA Philadelphia
- Assignee: Drexel University
- Current Assignee: Drexel University
- Current Assignee Address: US PA Philadelphia
- Agency: Mendelsohn Dunleavy, P.C.
- Main IPC: H01L31/032
- IPC: H01L31/032 ; C23C14/08 ; C23C14/34 ; C04B35/495 ; C04B35/626
Abstract:
A method of growing a FE material thin film using physical vapor deposition by pulsed laser deposition or RF sputtering is disclosed. The method involves creating a target to be used for the pulsed laser deposition in order to create a KBNNO thin film. The resultant KBNNO thin film is able to be used in photovoltaic cells.
Public/Granted literature
- US20170236955A1 Method for Making Ferroelectric Material Thin Films Public/Granted day:2017-08-17
Information query
IPC分类:
