Invention Grant
- Patent Title: Imprint apparatus and method for producing article
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Application No.: US15360307Application Date: 2016-11-23
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Publication No.: US10751920B2Publication Date: 2020-08-25
- Inventor: Hiroshi Sato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. I.P. Division
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@796c394c
- Main IPC: B29C43/58
- IPC: B29C43/58 ; G03F7/00 ; G03F9/00 ; B29C43/02 ; B29C43/36 ; G03F7/20

Abstract:
An imprint apparatus for forming a pattern of an imprint material on a substrate using a mold includes a plurality of alignment scopes and a control unit. The control unit controls aligning of a shot region of the substrate and the mold based on outputs from the plurality of alignment scopes. Each of the plurality of alignment scopes outputs information indicating a relative position of a first mark selected from a plurality of first marks in the shot region and a second mark selected from a plurality of second marks on the mold. The control unit controls aligning of the shot region and the mold based on information excluding incorrect information from a plurality of pieces of information output from the plurality of alignment scopes.
Public/Granted literature
- US20170151694A1 IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE Public/Granted day:2017-06-01
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