Invention Grant
- Patent Title: Micromechanical spring for an inertial sensor
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Application No.: US16069215Application Date: 2017-01-11
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Publication No.: US10752493B2Publication Date: 2020-08-25
- Inventor: Stefano Cardanobile
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@706ccbf2
- International Application: PCT/EP2017/050445 WO 20170111
- International Announcement: WO2017/121742 WO 20170720
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; G01P15/08

Abstract:
A micromechanical spring for an inertial sensor includes first and second spring elements situated parallel to each other and anchored on an anchoring element of the inertial sensor; and a third spring element situated between the two spring elements, anchored on the anchoring element, and having on both external sides a defined number of nub elements that are formed so as to have an increasing distance from the spring elements in a defined fashion as the distance from the anchoring element increases.
Public/Granted literature
- US20190002274A1 MICROMECHANICAL SPRING FOR AN INERTIAL SENSOR Public/Granted day:2019-01-03
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