Invention Grant
- Patent Title: Three-dimensional form measurement device
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Application No.: US16165948Application Date: 2018-10-19
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Publication No.: US10753731B2Publication Date: 2020-08-25
- Inventor: Daichi Watanabe
- Applicant: OLYMPUS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: OLYMPUS CORPORATION
- Current Assignee: OLYMPUS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B11/25

Abstract:
A three-dimensional form measurement device includes: an interference fringe projector that scans an interference fringe and projects one of a plurality of interference fringe patterns; an imaging device that images the subject of measurement onto which the interference fringe is projected and generates a plurality of interference fringe images corresponding to at least three different interference fringe patterns in each of a plurality of imaging conditions; and a controller that selects, for each pixel, which imaging condition should be used to compute a phase distribution image of the subject of measurement, and computes a phase of each pixel in the phase distribution image based on the pixel values in the plurality of interference fringe images corresponding to the imaging condition selected for each pixel.
Public/Granted literature
- US20190049237A1 THREE-DIMENSIONAL FORM MEASUREMENT DEVICE Public/Granted day:2019-02-14
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