Invention Grant
- Patent Title: Determination of operability of a digital scanner with shearing interferometry
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Application No.: US16298280Application Date: 2019-03-11
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Publication No.: US10753732B2Publication Date: 2020-08-25
- Inventor: Eric Peter Goodwin
- Applicant: Nikon Corporation
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Quarles & Brady LLP
- Agent Yakov Sidorin
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01M11/02 ; G01M11/00 ; G03F7/20 ; G01J9/02
Abstract:
System and method for monitoring of performance of a mirror array of a digital scanner with a use of a lateral shearing interferometer (operated in either static or a phase-shifting condition) to either simply identify problematic pixels for further troubleshooting or measure the exact magnitude of the mirror's deformation.
Public/Granted literature
- US20190204074A1 DETERMINATION OF OPERABILITY OF A DIGITAL SCANNER WITH SHEARING INTERFEROMETRY Public/Granted day:2019-07-04
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