Invention Grant
- Patent Title: Imaging optical system for microlithography
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Application No.: US13790443Application Date: 2013-03-08
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Publication No.: US10754132B2Publication Date: 2020-08-25
- Inventor: Olaf Rogalsky , Sonja Schneider , Boris Bittner , Jens Kugler , Bernhard Gellrich , Rolf Freimann
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@168e6f7d com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2dbf395b
- Main IPC: G02B17/06
- IPC: G02B17/06 ; G02B27/00 ; G03F7/20

Abstract:
An imaging optical system, in particular a projection objective, for microlithography, includes optical elements to guide electromagnetic radiation with a wavelength in a path to image an object field into an image plane. The imaging optical system includes a pupil, having coordinates (p, q), which, together with the image field, having coordinates (x, y) of the optical system, spans an extended 4-dimensional pupil space, having coordinates (x, y, p, q), as a function of which a wavefront W(x, y, p, q) of the radiation passing through the optical system is defined. The wavefront W can therefore be defined in the pupil plane as a function of an extended 4-dimensional pupil space spanned by the image field (x, y) and the pupil (p, q) as W(x, y, p, q)=W(t), with t=(x, y, p, q).
Public/Granted literature
- US20130188246A1 Imaging Optical System for Microlithography Public/Granted day:2013-07-25
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