Invention Grant
- Patent Title: Substrate detection device and method
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Application No.: US16117284Application Date: 2018-08-30
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Publication No.: US10754218B2Publication Date: 2020-08-25
- Inventor: Tingting Zhao
- Applicant: BOE Technology Group Co., Ltd. , Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Beijing CN Hefei
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD
- Current Assignee Address: CN Beijing CN Hefei
- Agency: Fay Sharpe LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@49f29608
- Main IPC: G02F1/139
- IPC: G02F1/139 ; G02F1/1333 ; G02F1/1335

Abstract:
A substrate detection device and method are provided. The substrate detection device includes: a base platform; and a birefringence structure; the base platform comprising a light source and a bearing platform; the bearing platform being configured to place the substrate to be detected; the light source being configured to illuminate the substrate to be detected from one side, close to the bearing platform, of the substrate to be detected. The phase difference of the lights is increased by a birefringence structure layer, such that interfere may happen with some lights having a relatively smaller phase difference. The difference in brightness of different regions on the light-outgoing side of the birefringence structure layer increases, such that the non-uniformity on the substrate manifests more easily. Therefore, the effect of avoiding the missed detection is achieved.
Public/Granted literature
- US20190265529A1 SUBSTRATE DETECTION DEVICE AND METHOD Public/Granted day:2019-08-29
Information query
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