Substrate detection device and method
Abstract:
A substrate detection device and method are provided. The substrate detection device includes: a base platform; and a birefringence structure; the base platform comprising a light source and a bearing platform; the bearing platform being configured to place the substrate to be detected; the light source being configured to illuminate the substrate to be detected from one side, close to the bearing platform, of the substrate to be detected. The phase difference of the lights is increased by a birefringence structure layer, such that interfere may happen with some lights having a relatively smaller phase difference. The difference in brightness of different regions on the light-outgoing side of the birefringence structure layer increases, such that the non-uniformity on the substrate manifests more easily. Therefore, the effect of avoiding the missed detection is achieved.
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