Invention Grant
- Patent Title: Device for moving workpiece platform
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Application No.: US16338660Application Date: 2017-09-26
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Publication No.: US10754263B2Publication Date: 2020-08-25
- Inventor: Guodong Cong
- Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@549cb85d
- International Application: PCT/CN2017/103335 WO 20170926
- International Announcement: WO2018/059377 WO 20180405
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03F7/20 ; H01L21/027

Abstract:
A device for moving a workpiece platform is provided, comprising a bottom frame (1) for supporting the workpiece platform, a pneumatic spring (2) disposed on a lower surface of the bottom frame (1), an air cushion unit (3) for generating flotation to support the workpiece platform when the workpiece platform is being moved, and a moving unit (200) disposed on the bottom frame (1). The moving unit (200) comprises: a roller unit (4), for driving the workpiece platform to move; a leaf spring (6), wherein one end of the leaf spring (6) is connected to a connecting block (5), and the other end thereof is connected to the roller unit (4); and a leaf spring deformation drive unit (8), connected to the leaf spring (6), to enable, by driving the leaf spring (6) to deform, the roller unit (4) to be in contact with the ground when the workpiece platform is being moved. The leaf spring deformation drive unit (8) is disposed such that the leaf spring (6) deforms, and the roller unit (4) is in contact with the ground when the workpiece platform is being moved in or out, driving the workpiece platform to move, preventing jamming in case of extremely high torque, and improving stability when the workpiece platform is being moved.
Public/Granted literature
- US20200012203A1 DEVICE FOR MOVING WORKPIECE PLATFORM Public/Granted day:2020-01-09
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