Invention Grant
- Patent Title: Multi-patterning techniques for fabricating an array of metal lines with different widths
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Application No.: US15859675Application Date: 2018-01-01
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Publication No.: US10755969B2Publication Date: 2020-08-25
- Inventor: Albert Chu , Kafai Lai , Lawrence A. Clevenger
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/498

Abstract:
Multi-patterning methods are provided for use in fabricating an array of metal lines comprising metal lines with different widths. For example, patterning methods implement spacer-is-dielectric (SID)-based self-aligned double patterning (SADP) methods for fabricating an array of metal lines comprising elongated metal lines with different widths, wherein an “unblock” mask is utilized as part of the process flow to overlap mandrel assigned and non-mandrel assigned features in a given SADP pattern to define regions to unblock a metal fill (remove dielectric material between wires) in a dielectric layer between defined metal lines of an a SADP pattern thus enabling the formation of wide metal lines within any region of a pattern of elongated metal lines formed with a minimum feature width.
Public/Granted literature
- US20190206725A1 MULTI-PATTERNING TECHNIQUES FOR FABRICATING AN ARRAY OF METAL LINES WITH DIFFERENT WIDTHS Public/Granted day:2019-07-04
Information query
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