Invention Grant
- Patent Title: Germanium-silicon light sensing apparatus
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Application No.: US15712852Application Date: 2017-09-22
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Publication No.: US10756127B2Publication Date: 2020-08-25
- Inventor: Yun-Chung Na , Szu-Lin Cheng , Shu-Lu Chen , Han-Din Liu , Hui-Wen Chen , Che-Fu Liang
- Applicant: Artilux, Inc.
- Applicant Address: US CA Menlo Park
- Assignee: Artilux, Inc.
- Current Assignee: Artilux, Inc.
- Current Assignee Address: US CA Menlo Park
- Agency: Fish & Richardson P.C.
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/0312 ; H01L31/09 ; H01L31/18 ; H01L31/0232 ; H01L31/105

Abstract:
A method for fabricating an image sensor array having a first group of photodiodes for detecting light at visible wavelengths a second group of photodiodes for detecting light at infrared or near-infrared wavelengths, the method including growing a germanium-silicon layer on a semiconductor donor wafer; defining pixels of the image sensor array on the germanium-silicon layer; defining a first interconnect layer on the germanium-silicon layer, wherein the interconnect layer includes a plurality of interconnects coupled to the first group of photodiodes and the second group of photodiodes; defining integrated circuitry for controlling the pixels of the image sensor array on a semiconductor carrier wafer; defining a second interconnect layer on the semiconductor carrier wafer, wherein the second interconnect layer includes a plurality of interconnects coupled to the integrated circuitry; and bonding the first interconnect layer with the second interconnect layer.
Public/Granted literature
- US20180012917A1 GERMANIUM-SILICON LIGHT SENSING APPARATUS Public/Granted day:2018-01-11
Information query
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