- Patent Title: Fabrication method for fused multi-layer amorphous selenium sensor
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Application No.: US16715023Application Date: 2019-12-16
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Publication No.: US10756283B2Publication Date: 2020-08-25
- Inventor: James Scheuermann , Wei Zhao
- Applicant: The Research Foundation for The State University of New York
- Applicant Address: US NY Albany
- Assignee: The Research Foundation for The State University of New York
- Current Assignee: The Research Foundation for The State University of New York
- Current Assignee Address: US NY Albany
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Main IPC: H01L51/42
- IPC: H01L51/42 ; H01L27/30 ; G01T1/20 ; G01T1/24

Abstract:
A sensor including a layer of amorphous selenium (a-Se) and at least one charge blocking layer is formed by depositing the charge blocking layer over a substrate prior to depositing the amorphous selenium, enabling the charge blocking layer to be formed at elevated temperatures. Such a process is not limited by the crystallization temperature of a-Se, resulting in the formation of an efficient charge blocking layer, which enables improved signal amplification of the resulting device. The sensor can be fabricated by forming first and second amorphous selenium layers over separate substrates, and then fusing the a-Se layers at a relatively low temperature.
Public/Granted literature
- US20200243783A1 FABRICATION METHOD FOR FUSED MULTI-LAYER AMORPHOUS SELENIUM SENSOR Public/Granted day:2020-07-30
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