Invention Grant
- Patent Title: Polishing method and polishing composition
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Application No.: US16254930Application Date: 2019-01-23
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Publication No.: US10759981B2Publication Date: 2020-09-01
- Inventor: Shuhei Takahashi , Masatoshi Tomatsu
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP
- Agency: Katten Munchin Rosenman LLP
- Main IPC: C09K3/14
- IPC: C09K3/14 ; C09G1/02 ; H01L21/02 ; B24B37/04 ; H01L21/304 ; B24B1/00 ; H01L29/16
Abstract:
Provided is a method for polishing a material having a Vickers hardness of 1500 Hv or higher. The polishing method comprises a step of carrying out preliminary polishing using a preliminary polishing composition that comprises an abrasive APRE and a step of carrying out final polishing using a final polishing composition that comprises an abrasive AFIN lower in hardness than the abrasive APRE.
Public/Granted literature
- US20190153278A1 POLISHING METHOD AND POLISHING COMPOSITION Public/Granted day:2019-05-23
Information query
