Invention Grant
- Patent Title: Showerhead tilt mechanism
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Application No.: US16257603Application Date: 2019-01-25
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Publication No.: US10760160B2Publication Date: 2020-09-01
- Inventor: Bin Luo , Timothy Scott Thomas , Damien Slevin , David Kamp
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C16/455 ; C23C16/50 ; C23C16/458 ; C23C16/44 ; C23C16/505 ; H01L21/02
Abstract:
A showerhead tilt adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing apparatus, the showerhead tilt adjustment mechanism including a differential screw which provides coarse and fine adjustments to adjust gap/tilt/planarization of a faceplate of the showerhead module with respect to an upper surface of a substrate pedestal module adjacent the faceplate in the semiconductor substrate processing apparatus.
Public/Granted literature
- US20190153601A1 SHOWERHEAD TILT MECHANISM Public/Granted day:2019-05-23
Information query
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