Invention Grant
- Patent Title: Shape measurement method and shape measurement device
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Application No.: US16081216Application Date: 2016-12-21
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Publication No.: US10760900B2Publication Date: 2020-09-01
- Inventor: Kaoru Minoshima
- Applicant: The University of Electro-Communications
- Applicant Address: JP Tokyo
- Assignee: The University of Electro-Communications
- Current Assignee: The University of Electro-Communications
- Current Assignee Address: JP Tokyo
- Agency: Meunier Carlin & Curfman LLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@28ac3b2f
- International Application: PCT/JP2016/088196 WO 20161221
- International Announcement: WO2017/149912 WO 20170908
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01S17/10 ; G01B9/02 ; G01S17/89

Abstract:
A shape measurement method of the present invention includes: a step of irradiating a measurement object with an optical pulse train in which a plurality of optical pulses that have predetermined frequency distributions on a time axis are disposed chronologically in numerical order; and a step of measuring an optical shape of the measurement object in accordance with a correspondent relation between numbers of the optical pulses of a plurality of detection target optical pulse trains after the emitted optical pulse train acts on the measurement object and a correspondent relation between the frequency distributions in the optical pulses.
Public/Granted literature
- US20190086197A1 SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT DEVICE Public/Granted day:2019-03-21
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