Invention Grant
- Patent Title: Particle detecting device and control method for the particle detecting device
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Application No.: US16307666Application Date: 2017-05-23
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Publication No.: US10761008B2Publication Date: 2020-09-01
- Inventor: Seiichiro Kinugasa
- Applicant: AZBIL CORPORATION
- Applicant Address: JP Chiyoda-ku
- Assignee: AZBIL CORPORATION
- Current Assignee: AZBIL CORPORATION
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5e7abb17
- International Application: PCT/JP2017/019242 WO 20170523
- International Announcement: WO2017/212914 WO 20171214
- Main IPC: G01N15/14
- IPC: G01N15/14

Abstract:
A particle detecting device includes a chamber 30; a first introduction flow path 225 for introducing a particle-containing fluid into the chamber 30; a second introduction flow path 235 for introducing a particle-free fluid into the chamber 30; a light source 10 configured to illuminate fluid in the chamber 30 to detect particles contained in the fluid; a discharge flow path 260 for discharging fluid from the chamber 30; an introduction flow meter 245 configured to measure a flow rate of fluid flowing through the second introduction flow path 235; and a control unit 301 configured to perform control such that a fluid having a total flow rate obtained by adding a predetermined flow rate of fluid flowing through the first introduction flow path 225 to a flow rate of fluid flowing through the second introduction flow path 235, the flow rate being measured by the introduction flow meter 245, flows through the discharge flow path 260.
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