Invention Grant
- Patent Title: Physical quantity sensor, inertia measurement device, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle
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Application No.: US16143566Application Date: 2018-09-27
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Publication No.: US10761109B2Publication Date: 2020-09-01
- Inventor: Shogo Inaba , Atsuki Naruse , Shigekazu Takagi , Tomokazu Umeno , Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@45396087
- Main IPC: G01C19/5628
- IPC: G01C19/5628 ; G01P15/125 ; G01P15/08 ; G01P15/13 ; G01C19/56

Abstract:
A physical quantity sensor includes a substrate, an element portion disposed so as to overlap the substrate, a conductor pattern disposed on the substrate so as to face the element portion, and a protection film covering at least a part of an exposed portion of the conductor pattern exposed from element portion in a plan view from a direction in which the substrate and the element portion overlap.
Public/Granted literature
Information query
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