Invention Grant
- Patent Title: Fingerprint sensor and manufacturing method thereof
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Application No.: US15884287Application Date: 2018-01-30
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Publication No.: US10762319B2Publication Date: 2020-09-01
- Inventor: Chih-Hsuan Tai , Chih-Hua Chen , Hao-Yi Tsai , Yu-Chih Huang , Chia-Hung Liu , Ting-Ting Kuo , Ying-Cheng Tseng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: G06K9/00
- IPC: G06K9/00 ; H01L21/70

Abstract:
A fingerprint sensor includes a die, a plurality of conductive structures, an encapsulant, a plurality of conductive patterns, a first dielectric layer, a second dielectric layer, and a redistribution structure. The die has an active surface and a rear surface opposite to the active surface. The conductive structures surround the die. The encapsulant encapsulates the die and the conductive structures. The conductive patterns are over the die and are electrically connected to the die and the conductive structures. Top surfaces of the conductive patterns are flat. The first dielectric layer is over the die and the encapsulant. A top surface of the first dielectric layer is coplanar with top surfaces of the conductive patterns. The second dielectric layer covers the first dielectric layer and the conductive patterns. The redistribution structure is over the rear surface of the die.
Public/Granted literature
- US20190236326A1 FINGERPRINT SENSOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-08-01
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