Invention Grant
- Patent Title: Non-contact method to monitor and quantify effective work function of metals
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Application No.: US15055062Application Date: 2016-02-26
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Publication No.: US10763179B2Publication Date: 2020-09-01
- Inventor: Dmitriy Marinskiy , Thye Chong Loy , Jacek Lagowski , Sung-Li Wang , Lin-Jung Wu , Shyh-Shin Ferng , Yi-Hung Lin , Sheng-Shin Lin
- Applicant: SEMILAB Semiconductor Physics Laboratory Co., Ltd. , Sung-Li Wang , Lin-Jung Wu , Shyh-Shin Ferng , Yi-Hung Lin , Sheng-Shin Lin
- Applicant Address: HU Budapest
- Assignee: SEMILAB Semiconductor Physics Laboratory Co., Ltd.
- Current Assignee: SEMILAB Semiconductor Physics Laboratory Co., Ltd.
- Current Assignee Address: HU Budapest
- Agency: Fish & Richardson P.C.
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/26 ; H01L21/66 ; G01R31/265 ; G01R31/28 ; G01N17/00

Abstract:
An example semiconductor wafer includes a semiconductor layer, a dielectric layer disposed on the semiconductor layer, and a layer of the metal disposed on the dielectric layer. An example method of determining an effective work function of a metal on the semiconductor wafer includes determining a surface barrier voltage of the semiconductor wafer, and determining a metal effective work function of the semiconductor wafer based, at least in part, on the surface barrier voltage.
Public/Granted literature
- US20160252565A1 NON-CONTACT METHOD TO MONITOR AND QUANTIFY EFFECTIVE WORK FUNCTION OF METALS Public/Granted day:2016-09-01
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