Array substrate, manufacturing method thereof, display panel and manufacturing method thereof
Abstract:
A method for manufacturing the array substrate includes: forming a gate metal layer on a base by a first patterning process and forming a gate insulating layer on the gate metal layer; forming a semiconductor layer and a source/drain metal layer by a second patterning process on the resulted base, the source/drain metal layer including a data line and a metal electrode connected to the data line; forming a first electrode on the resulted base and forming a channel region by a third patterning process, the channel region causing the metal electrode to form a source electrode and a drain electrode; forming a passivation layer and an organic insulating layer by a fourth patterning process on the resulted base; the organic insulating layer at least corresponding to the data line; and forming a second electrode by a fifth patterning process on the resulted base.
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