Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16367329Application Date: 2019-03-28
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Publication No.: US10763373B2Publication Date: 2020-09-01
- Inventor: Yutaka Okazaki , Akihisa Shimomura , Naoto Yamade , Tomoya Takeshita , Tetsuhiro Tanaka
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7b0892fa
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66 ; H01L29/45 ; H01L29/49 ; H01L27/12

Abstract:
A transistor with favorable electrical characteristics is provided. One embodiment of the present invention is a semiconductor device including a semiconductor, a first insulator in contact with the semiconductor, a first conductor in contact with the first insulator and overlapping with the semiconductor with the first insulator positioned between the semiconductor and the first conductor, and a second conductor and a third conductor, which are in contact with the semiconductor. One or more of the first to third conductors include a region containing tungsten and one or more elements selected from silicon, carbon, germanium, tin, aluminum, and nickel.
Public/Granted literature
- US20190221674A1 SEMICONDUCTOR DEVICE Public/Granted day:2019-07-18
Information query
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