Invention Grant
- Patent Title: Crystallized silicon vertical diode on BEOL for access device for confined PCM arrays
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Application No.: US16414406Application Date: 2019-05-16
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Publication No.: US10763374B2Publication Date: 2020-09-01
- Inventor: Fabio Carta , Chung H. Lam , Matthew J. BrightSky , Bahman Hekmatshoartabari
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent L. Jeffrey Kelly
- Main IPC: H01L29/872
- IPC: H01L29/872 ; H01L21/02 ; H01L27/24 ; H01L21/20 ; H01L45/00 ; H01L29/66 ; H01L29/868 ; H01L29/861

Abstract:
A method is presented for integrating an electronic component in back end of the line (BEOL) processing. The method includes forming a first electrode over a semiconductor substrate, forming a first electrically conductive material over a portion of the first electrode, and forming a second electrically conductive material over the first electrically conductive material, where the first and second electrically conductive materials define a p-n junction. The method further includes depositing a second electrode between a set of spacers and in direct contact with the p-n-junction, depositing a phase change material over the p-n junction and in direct contact with the second electrode, and forming a third electrode over a portion of the phase change material.
Public/Granted literature
- US20190305142A1 CRYSTALLIZED SILICON VERTICAL DIODE ON BEOL FOR ACCESS DEVICE FOR CONFINED PCM ARRAYS Public/Granted day:2019-10-03
Information query
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