• Patent Title: Photodetector device with integrated high-contrast grating polarizer
  • Application No.: US16311470
    Application Date: 2017-06-13
  • Publication No.: US10763380B2
    Publication Date: 2020-09-01
  • Inventor: Jens HofrichterJan Enenkel
  • Applicant: ams AG
  • Applicant Address: AT Premstaetten
  • Assignee: ams AG
  • Current Assignee: ams AG
  • Current Assignee Address: AT Premstaetten
  • Agency: Fish & Richardson P.C.
  • Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1cedda5b
  • International Application: PCT/EP2017/064415 WO 20170613
  • International Announcement: WO2017/220380 WO 20171228
  • Main IPC: H01L31/0232
  • IPC: H01L31/0232
Photodetector device with integrated high-contrast grating polarizer
Abstract:
The photodetector device comprises a substrate (1) of semiconductor material, a sensor region (2) in the substrate, a plurality of grid elements (4) arranged at a distance (d) from one another above the sensor region, the grid elements having a refractive index, a region of lower refractive index (3), the grid elements being arranged on the region of lower refractive index, and a further region of lower refractive index (5) covering the grid elements.
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