Invention Grant
- Patent Title: Hall element for 3-D sensing and method for producing the same
-
Application No.: US16243801Application Date: 2019-01-09
-
Publication No.: US10763427B2Publication Date: 2020-09-01
- Inventor: Eng Huat Toh , Ruchil Kumar Jain , Yongshun Sun , Shyue Seng Tan
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Ditthavong & Steiner P.C.
- Main IPC: H01L43/06
- IPC: H01L43/06 ; H01L43/14 ; G01R33/07 ; H01L43/04

Abstract:
A method of forming a 3D Hall effect sensor and the resulting device are provided. Embodiments include forming a p-type well in a substrate; forming a first n-type well in a first region surrounded by the p-type well in top view; forming a second n-type well in a second region surrounding the p-type well; implanting n-type dopant in the first and second n-type wells; and implanting p-type dopant in the p-type well and the first n-type well.
Public/Granted literature
- US20190148624A1 HALL ELEMENT FOR 3-D SENSING AND METHOD FOR PRODUCING THE SAME Public/Granted day:2019-05-16
Information query
IPC分类: