Invention Grant

Measurement device
Abstract:
A measurement device that can improve measurement accuracy and increase the number of times of service of a measurement jig. The measurement device includes a movement control section that positions the measurement jig at an instructed position in the transfer direction, an imaging control section that images the positioned measurement jig by the measurement camera and acquires an image data, an image processing section that calculates an actual position of the measurement jig based on multiple measurement marks which are included in the image data, and an error measurement section that measures a positioning error in the transfer direction due to the driving device based on the instructed position and the actual position.
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