Invention Grant
- Patent Title: Purge device, purge stocker, and method for feeding purge gas
-
Application No.: US15749803Application Date: 2016-06-09
-
Publication No.: US10766056B2Publication Date: 2020-09-08
- Inventor: Shinji Onishi
- Applicant: MURATA MACHINERY, LTD.
- Applicant Address: JP Kyoto
- Assignee: MURATA MACHINERY, LTD.
- Current Assignee: MURATA MACHINERY, LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@ae6664a
- International Application: PCT/JP2016/067203 WO 20160609
- International Announcement: WO2017/022330 WO 20170209
- Main IPC: B08B9/28
- IPC: B08B9/28 ; H01L21/677 ; B08B5/02 ; B08B9/34 ; B08B9/08 ; H01L21/673 ; F16K21/00
Abstract:
A purge device includes: a plurality of mounts on which containers are to be placed and that are grouped, a nozzle that is structured such that when a container is placed on the corresponding mount, a flow path to supply a purge gas to the container is opened, and a flow rate controller that adjusts a flow rate of the purge gas supplied into a group based on a number of containers in the group.
Public/Granted literature
- US20180229277A1 PURGE DEVICE, PURGE STOCKER, AND METHOD FOR FEEDING PURGE GAS Public/Granted day:2018-08-16
Information query
IPC分类:
