- Patent Title: ScAIMgO4 single crystal substrate and method for producing the same
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Application No.: US16356790Application Date: 2019-03-18
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Publication No.: US10767277B2Publication Date: 2020-09-08
- Inventor: Kentaro Miyano , Naoto Yanagita , Naoya Ryoki , Takehiro Asahi , Masaki Nobuoka
- Applicant: PANASONIC CORPORATION
- Applicant Address: JP Osaka
- Assignee: PANASONIC CORPORATION
- Current Assignee: PANASONIC CORPORATION
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@24ae2fd4
- Main IPC: C30B29/22
- IPC: C30B29/22 ; C30B15/14 ; H01L33/00 ; C30B15/20

Abstract:
A ScAlMgO4 single crystal substrate having less collapse of crystal orientation, and a method for producing the single crystal substrate. A ScAlMgO4 single crystal substrate is provided, wherein, when a center of the substrate is designated as coordinates (0,0) and a measurement beam width is set to 1 [mm]×7 [mm] to conduct analysis according to an X-ray diffraction method at respective coordinate positions of (x−m,0) to (xm,0) at an interval of 1 [mm] in an x-axis direction and (0,y−n) to (0,yn) at an interval of 1 mm in a y-axis direction, wherein m and n are each an integer falling within the range so that the measurement beam is not stuck out from the substrate, a worst value of a full width at half maximum of a rocking curve at each of the coordinate positions is less than 20 [sec.].
Public/Granted literature
- US20190284717A1 ScAlMgO4 SINGLE CRYSTAL SUBSTRATE AND METHOD FOR PRODUCING THE SAME Public/Granted day:2019-09-19
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