Invention Grant
- Patent Title: Plating analysis method, plating analysis system, and computer readable storage medium for plating analysis
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Application No.: US16180801Application Date: 2018-11-05
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Publication No.: US10768140B2Publication Date: 2020-09-08
- Inventor: Mitsuhiro Shamoto , Masashi Shimoyama
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@21dd0686
- Main IPC: G01N27/42
- IPC: G01N27/42 ; C25D21/12 ; G01N33/208 ; G01B7/06

Abstract:
The present disclosure provides techniques for determining plating conditions by numerically analyzing a film-thickness distribution. The disclosed techniques comprise performing electrochemical measurement in an electroplating apparatus; determining electrochemical parameters based on a result of the electrochemical measurement; receiving initial plating conditions for performing a plating process; based on the electrochemical parameters and the initial plating conditions, determining a current density distribution on a surface of a substrate based on a function formula which comprises a variable which represents a position on the substrate; based on the current density distribution, calculating a thickness of a film to be plated on the substrate; and performing the plating process based on final plating conditions corresponding to a calculated film-thickness distribution satisfying a desired film-thickness distribution.
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