Invention Grant
- Patent Title: Process for manufacturing a MEMS micromirror device, and associated device
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Application No.: US15465019Application Date: 2017-03-21
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Publication No.: US10768408B2Publication Date: 2020-09-08
- Inventor: Enri Duqi , Lorenzo Baldo , Roberto Carminati , Flavio Francesco Villa
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1933101b
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81C1/00 ; B81B7/02 ; G02B26/10 ; H04N9/31
Abstract:
A buried cavity is formed in a monolithic body to delimit a suspended membrane. A peripheral insulating region defines a supporting frame in the suspended membrane. Trenches extending through the suspended membrane define a rotatable mobile mass carried by the supporting frame. The mobile mass forms an oscillating mass, supporting arms, spring portions, and mobile electrodes that are combfingered to fixed electrodes of the supporting frame. A reflecting region is formed on top of the oscillating mass.
Public/Granted literature
- US20180031822A1 PROCESS FOR MANUFACTURING A MEMS MICROMIRROR DEVICE, AND ASSOCIATED DEVICE Public/Granted day:2018-02-01
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