Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
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Application No.: US15422498Application Date: 2017-02-02
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Publication No.: US10768525B2Publication Date: 2020-09-08
- Inventor: Akiko Iimura , Toshiki Ito
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3e6c1268
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
An imprint apparatus forms a pattern by curing a radical polymerizable imprint material by irradiating the imprint material with light in a state in which a mold is brought into contact with the imprint material. The apparatus includes an irradiator configured to irradiate the imprint material with light, and a controller configured to control the irradiator. Letting Ic be an illuminance of the light with which the imprint material is irradiated, tc be a time during which the imprint material is irradiated with the light, k be a coefficient, and PD be a target degree of photopolymerization of the imprint material subjected to irradiation with the light, the controller determines the irradiation time in accordance with: PD=k×(√Ic)×tc.
Public/Granted literature
- US20170232645A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2017-08-17
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