Invention Grant
- Patent Title: Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus
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Application No.: US15550971Application Date: 2015-09-08
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Publication No.: US10770315B2Publication Date: 2020-09-08
- Inventor: Zhenming Chu , Xi Wang , Hui Wang , Shena Jia , Jun Wu , Fuping Chen , Xuejun Li
- Applicant: ACM Research (Shanghai) Inc.
- Applicant Address: CN Shanghai
- Assignee: ACM Research (Shanghai) Inc.
- Current Assignee: ACM Research (Shanghai) Inc.
- Current Assignee Address: CN Shanghai
- Agency: Osha Liang LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5087de17
- International Application: PCT/CN2015/089096 WO 20150908
- International Announcement: WO2016/127635 WO 20160818
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/67 ; B08B13/00 ; B08B3/02 ; B08B9/00 ; B08B3/08 ; B08B3/12 ; B08B5/02 ; G08B21/18 ; H01L21/687 ; G01B5/14 ; G01B7/14 ; G01B11/14
Abstract:
A fall-proof apparatus for cleaning semiconductor devices is provided. The fall-proof apparatus comprises: a nozzle (102) connecting with a carrier (101); a megasonic/ultrasonic device (105) fixing on the carrier (101); and a sensor (104) detecting the distance between the megasonic/ultrasonic device (105) and the carrier (101) to determine whether the megasonic/ultrasonic device (105) is loose and going to fall. The megasonic/ultrasonic device works with the nozzle during a cleaning process. A chamber with the fall-proof apparatus is also provided.
Public/Granted literature
- US20180033654A1 A FALL-PROOF APPARATUS FOR CLEANING SEMICONDUCTOR DEVICES AND A CHAMBER WITH THE APPARATUS Public/Granted day:2018-02-01
Information query
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