Invention Grant
- Patent Title: Substrate holding device
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Application No.: US15600867Application Date: 2017-05-22
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Publication No.: US10770334B2Publication Date: 2020-09-08
- Inventor: Tomohiro Ishino , Shinya Kikuchi
- Applicant: NGK SPARK PLUG CO., LTD.
- Applicant Address: JP Nagoya
- Assignee: NGK SPARK PLUG CO., LTD.
- Current Assignee: NGK SPARK PLUG CO., LTD.
- Current Assignee Address: JP Nagoya
- Agency: Stites & Harbison, PLLC
- Agent Jeffrey A. Haeberlin; James R. Hayne
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@50eed113
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/687 ; H01L21/67 ; H01L21/677
Abstract:
A substrate holding device includes a base body that has a flat plate-like shape and in which gas holes that open in an upper surface of the base body are formed, and a plurality of protrusions that protrude upward from the upper surface of the base body. A groove that opens in a lower surface of the base body and that is connected to the gas holes is formed in the base body, and a plurality of protrusions that protrude downward are formed in the groove.
Public/Granted literature
- US20170345701A1 SUBSTRATE HOLDING DEVICE Public/Granted day:2017-11-30
Information query
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