Invention Grant
- Patent Title: Location-specific laser annealing to improve interconnect microstructure
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Application No.: US16669708Application Date: 2019-10-31
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Publication No.: US10770348B2Publication Date: 2020-09-08
- Inventor: Benjamin David Briggs , Lawrence A. Clevenger , Bartlet H. Deprospo , Michael Rizzolo
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: McGinn IP Law Group, PLLC
- Agent Vazken Alexanian
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/768 ; H01L21/67 ; H01L21/66 ; B23K26/082 ; B23K26/00 ; B23K26/03 ; B23K26/70 ; B23K26/062 ; B23K26/352 ; H01L23/532

Abstract:
A method (and structure) includes performing an initial partial anneal of a metal interconnect overburden layer for semiconductor devices being fabricated on a chip on a semiconductor wafer. Orientation of an early recrystallizing grain at a specific location on a top surface of the metal overburden layer is determined, as implemented and controlled by a processor on a computer. A determination is made whether the orientation of the early recrystallizing grain is desirable or undesirable.
Public/Granted literature
- US20200075406A1 LOCATION-SPECIFIC LASER ANNEALING TO IMPROVE INTERCONNECT MICROSTRUCTURE Public/Granted day:2020-03-05
Information query
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