Invention Grant
- Patent Title: Semiconductor substrate production systems and related methods
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Application No.: US16581964Application Date: 2019-09-25
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Publication No.: US10770351B2Publication Date: 2020-09-08
- Inventor: Michael J. Seddon
- Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: Adam R. Stephenson, Ltd.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/78 ; C30B29/36 ; B23K26/53 ; B23K101/40

Abstract:
Implementations of a method of separating a wafer from a boule including semiconductor material may include: creating a damage layer in a boule comprising semiconductor material. The boule may have a first end and a second end. The method may include cooling the first end of the boule and heating the second end of the boule. A thermal gradient may be formed between the cooled first end and the heated second end. The thermal gradient may assist a silicon carbide wafer to separate from the boule at the damage layer.
Public/Granted literature
- US20200020586A1 SEMICONDUCTOR SUBSTRATE PRODUCTION SYSTEMS AND RELATED METHODS Public/Granted day:2020-01-16
Information query
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