Invention Grant
- Patent Title: Semiconductor device and fabrication method thereof
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Application No.: US15834681Application Date: 2017-12-07
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Publication No.: US10770352B2Publication Date: 2020-09-08
- Inventor: Fei Zhou
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@78c1e048
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/28 ; H01L21/3213 ; H01L29/423 ; H01L29/08 ; C23F1/00 ; H01L27/088 ; H01L29/78 ; H01L29/16 ; H01L29/161

Abstract:
A semiconductor device and a fabrication method are provided. The fabrication method includes providing a base substrate including a first region for forming a first transistor and a second region for forming a second transistor, the first transistor having a working current less than the second transistor. The fabrication method further includes forming a gate electrode layer on the base substrate; etching the gate electrode layer to form a first gate electrode in the first region; after forming the first gate electrode, etching the gate electrode layer to form a second gate electrode in the second region, with the second gate electrode having an undercut structure; forming a first source/drain doped region in the base substrate on both sides of the first gate electrode and forming a second source/drain region in the base substrate on both sides of the second gate electrode.
Public/Granted literature
- US20180166342A1 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2018-06-14
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