Invention Grant
- Patent Title: IC structure with interdigitated conductive elements between metal guard structures
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Application No.: US16240436Application Date: 2019-01-04
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Publication No.: US10770407B2Publication Date: 2020-09-08
- Inventor: Zhuojie Wu , Cathryn J. Christiansen , Erdem Kaltalioglu , Ping-Chuan Wang , Ronald G. Filippi, Jr. , Eric D. Hunt-Schroeder , Nicholas A. Polomoff
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent David Cain
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/538 ; G01N27/12

Abstract:
An integrated circuit (IC) structure includes a back end of line (BEOL) stack on a substrate, the BEOL stack having a plurality of metal layers therein and a plurality of inter-level dielectric (ILD) layers therein. The plurality of metal layers includes a lowermost metal layer and an uppermost metal layer. A pair of metal guard structures proximate a perimeter of the BEOL stack concentrically surrounds the active circuitry. Each metal guard structure includes a continuous metal fill between the lowermost metal layer and the uppermost metal layer of the plurality of metal layers. A set of interdigitating conductive elements within one of the plurality of metal layers includes a first plurality of conductive elements electrically coupled to one of the pair of metal guard structures interdigitating with a second plurality of conductive elements electrically coupled to the other of the pair of metal guard structures.
Public/Granted literature
- US20200219826A1 IC STRUCTURE WITH INTERDIGITATED CONDUCTIVE ELEMENTS BETWEEN METAL GUARD STRUCTURES Public/Granted day:2020-07-09
Information query
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