Invention Grant
- Patent Title: Guard ring for photonic integrated circuit die
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Application No.: US16109867Application Date: 2018-08-23
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Publication No.: US10770412B2Publication Date: 2020-09-08
- Inventor: Nicholas A. Polomoff , Andreas D. Stricker , Anupam I Arora
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L23/58
- IPC: H01L23/58 ; H01L23/522 ; H01L23/528 ; H01L23/00 ; G02B6/12

Abstract:
Embodiments of the disclosure provide a photonic integrated circuit (PIC) die including: a semiconductor substrate; active circuitry on the semiconductor substrate; an inter-level dielectric (ILD) over the semiconductor substrate and the active circuitry; a photonic element extending from the active circuitry on the semiconductor substrate; and a guard ring on the semiconductor substrate and within the ILD, the guard ring surrounding the active circuitry, the guard ring including: a conductive body, and a conductive bridge element extending over the photonic element.
Public/Granted literature
- US20200066656A1 GUARD RING FOR PHOTONIC INTEGRATED CIRCUIT DIE Public/Granted day:2020-02-27
Information query
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