Invention Grant
- Patent Title: Small-gap coplanar tunable capacitors and methods for manufacturing thereof
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Application No.: US16672151Application Date: 2019-11-01
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Publication No.: US10770540B2Publication Date: 2020-09-08
- Inventor: Andrew Vladimir Claude Cervin , Marina Zelner
- Applicant: NXP USA, Inc.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01G7/06 ; H01L23/522 ; H01L21/283 ; H01L21/311 ; H01L21/3213 ; H01L23/528 ; H01G4/33 ; H01G4/12

Abstract:
A coplanar capacitor that incorporates teachings of the subject disclosure may include: a substrate; a voltage-tunable dielectric layer over the substrate; a plurality of bias lines over the voltage-tunable dielectric layer (wherein the bias lines are covered by an inter-level dielectric); a plurality of sidewall spacers (wherein each of the sidewall spacers is located adjacent one of the bias lines and each of the sidewall spacers spans between a respective portion of the voltage-tunable dielectric layer and a respective portion of the inter-level dielectric); and an electrode over the inter-level dielectric, and over portions of the voltage-tunable dielectric layer that are not covered by the plurality of bias lines and that are not covered by the sidewall spacers, wherein a plurality of gaps are disposed in the electrode. Other embodiments are disclosed.
Public/Granted literature
- US20200066836A1 SMALL-GAP COPLANAR TUNABLE CAPACITORS AND METHODS FOR MANUFACTURING THEREOF Public/Granted day:2020-02-27
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