Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US16463742Application Date: 2018-10-16
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Publication No.: US10770574B2Publication Date: 2020-09-08
- Inventor: Naiqian Zhang , Xingxing Wu , Xinchuan Zhang
- Applicant: DYNAX SEMICONDUCTOR, INC.
- Applicant Address: CN Kunshan
- Assignee: DYNAX SEMICONDUCTOR, INC.
- Current Assignee: DYNAX SEMICONDUCTOR, INC.
- Current Assignee Address: CN Kunshan
- Agency: Armstrong Teasdale LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3a1d2d46
- International Application: PCT/CN2018/110419 WO 20181016
- International Announcement: WO2019/076299 WO 20190425
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/66

Abstract:
Embodiments of the present disclosure provide a semiconductor device and a method for manufacturing the same. The semiconductor device includes an active region and an inactive region located outside of the active region, the semiconductor device including a substrate, a semiconductor layer including a first semiconductor layer located in the active region and a second semiconductor layer located in the inactive region, a source, a drain, and a gate. A via hole penetrated through the substrate and the semiconductor layers below the source is provided below the source. A part of the via hole is located in the second semiconductor layer of the inactive region and penetrates at least one part of the second semiconductor layer.
Public/Granted literature
- US20190386126A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2019-12-19
Information query
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