Invention Grant
- Patent Title: Oriented piezoelectric film, method for producing the oriented piezoelectric film, and liquid dispensing head
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Application No.: US16435998Application Date: 2019-06-10
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Publication No.: US10770645B2Publication Date: 2020-09-08
- Inventor: Yoshihiro Ohashi , Yoshinori Kotani , Motokazu Kobayashi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@743f5a6d
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/047 ; H01L41/09 ; H01L41/318 ; B41J2/14 ; C04B41/00 ; C04B35/468

Abstract:
An oriented piezoelectric film, wherein a crystal forming the oriented piezoelectric film, is a perovskite type crystal of the general formula of Ba1-xCaxTi1-yZryO3 (0≤x≤0.2, and 0≤y≤0.2), and the oriented piezoelectric film has (111) orientation according to a pseudocubic crystal notation.
Public/Granted literature
Information query
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