Invention Grant
- Patent Title: Manufacturing method for flexible PMUT array
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Application No.: US15443330Application Date: 2017-02-27
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Publication No.: US10770646B2Publication Date: 2020-09-08
- Inventor: Donald William Kidwell, Jr. , Ravindra Shenoy , Jon Lasiter
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Paradice and Li LLP
- Main IPC: H01L41/22
- IPC: H01L41/22 ; H01L41/047 ; A61B8/00 ; H01L41/09 ; H01L27/20 ; H01L41/053 ; H01L41/08 ; H01L41/29 ; H01L41/314 ; H01L41/33 ; B06B1/06

Abstract:
Techniques and structures are provided for manufacturing a flexible PMUT array. In one embodiment, a piezoelectric micromechanical ultrasonic transducer (PMUTs) array comprises a plurality of PMUTs, where each PMUT in the flexible array of PMUTs includes: a first polymer layer configured to support the PMUT, a mechanical layer configured to provide planarization to the PMUT, a first electrode, a second electrode, a piezoelectric layer configured to separate the first electrode and the second electrode, patterns on the first electrode, the piezoelectric material, and the second electrode configured to route electrical signals, and a cavity configured to adjust a frequency response of the PMUT.
Public/Granted literature
- US20170252777A1 FLEXIBLE PMUT ARRAY Public/Granted day:2017-09-07
Information query
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